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Computational Modeling in Semiconductor Processing

Computational Modeling in Semiconductor Processing

By (author): M. Meyyappan
Copyright: 1994
Pages: 363
ISBN: 9780890067079

Hardback $59.00 Qty:
This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation - so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.
A Review of Numerical Methods. Crystal Growth. Chemical Vapor Deposition Processes. Plasma Process Modeling. Rapid Thermal Processing.
  • M. Meyyappan
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