This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Table Of Contents
MEMS and NEMS Resonator Technologies - What Is MEMS and What Is NEMS?. Physical Fundamentals of MEMS and NEMS Resonators. Key Fabrication Technologies. Summary.; Acoustic Microresonator Technologies -Introduction to Acoustic Wave Resonators. Fundamentals of Piezoelectricity and Acoustic Wave Propagation. Surface Acoustic Wave (SAW) Resonators. Bulk Acoustic Wave Resonators. Summary.; Design and Modeling of Micro- and Nanoresonators - The Stages of Resonator Design and Modeling. The Electromechanical Transformer. Equivalent-Circuit Models. Finite Element Modeling (FEM). Summary.; Fabrication Techniques - Process Overview. FBAR Fabrication Techniques. Instrumentation and Materials for Fabrication. Process Compatibility and Characterization. Summary.; Characterization Techniques - Low- and High-Frequency Electrical Characterization. Determination of Elastic, Dielectric, and Piezoelectric Constants. Equivalent-Circuit-Parameter Extraction. AFM, Optical, and Electron-Beam-Induced Characterization. Summary.; Performance Optimization - Frequency Stability. .Temperature Compensation. Frequency Tuning. Summary.; Integration of Resonator to CMOS Technologies - Integration Strategies. State-of-the-Art Integrated Applications. Wafer-Level-Transfer-Based FBAR-to-CMOS Integration. Summary.; Sensor Applications - Resonant Sensing Performance. Mass Sensors. Mechanical Sensors. Atomic Force Detection. Magnetic Sensors. Summary.; Radio Frequency Applications -Introduction. Passive-Circuit Applications. Active-Circuit Applications. Summary.; Case Studies: Modeling, Design, and Fabrication of FBAR and MEMS-Based Systems - Methodological Approach for MEMS-IC Integration. Case I: Compatibility of FBAR and Silicon Technologies. Case II: High-Level Design of a Temperature-Compensated (TC) Oscillator. Case III: Read-Out Circuit Design of a 434-MHz MEMS Resonator. Summary.; About the Author. Index. ;